Microelectronic machinery and apparatus (Германия - Тендер #43819931)

1. Section I
   1. Name and addresses
      Fraunhofer-Gesellschaft - Einkauf B12
      Hansastraße 27c
      München
      80686
      Germany
      E-mail: einkauf@zv.fraunhofer.de
      
   2. Joint procurement
      
   3. Communication
      The procurement documents are available for unrestricted and full direct access, free of charge, at
      https://vergabe.fraunhofer.de/NetServer/TenderingProcedureDetails?function=_Details&TenderOID=54321-Tender-188fbc22605-20fb82c4ce586348
      Additional information can be obtained from the abovementioned addresselectronically via: https://vergabe.fraunhofer.de
      
      
   4. Type of the contracting authority:
      Other type: Research Society e. V.
      
   5. Main activity:
      Other activity: Research and Development
      
2. Section II
   1. Scope of the procurement:
      1. Title:
         

         DUV scanner - PR398854-2480-W

         Reference number: PR398854-2480-W
         
      2. Main CPV code:
         31712100
         
      3. Type of contract:
         Supplies
         
      4. Short description:
         

         DUV scanner

      5. Estimated total value:
         
         
      6. Information about lots:
         This contract is divided into lots: no
   2. Description
      1. Title:
         
      2. Additional CPV code(s):
         
         
      3. Place of performance:
         Main site or place of performance:

         Fraunhofer IPMS CNT

         An der Bartlake 5

         01109 Dresden

         Deutschland

      4. Description of the procurement:
         

         A system is being purchased that exposes silicon wafers with a diameter of 300mm using a 248nm laser and mask and is intended to transfer the image on the mask to a resist mask by reducing it 4:1. The system should expose individual and dense structures with a defined resolution of ≤110nm and the bearing offset should be ≤9nm. In combination with a TRACK (cluster/inline operation), wafers are processed for both research and industrial purposes

      5. Award criteria:
         Price is not the only award criterion and all criteria are stated only in the procurement documents
      6. Estimated value:
         
         
      7. Duration of the contract, framework agreement or dynamic purchasing system:
         
         Start: 2023-09-01
         End: 2025-12-31
         This contract is subject to renewal: no
         
      8. Information about the limits on the number of candidates to be invited:
         
      9. Information about variants:
         Variants will be accepted: no
         
      10. Information about options:
          Options: no
      11. Information about electronic catalogues:
          
          
      12. Information about European Union funds:
          The procurement is related to a project and/or programme financed by European Union funds: no
      13. Additional information:
          
3. Section III
   1. Conditions for participation:
      1. Suitability to pursue the professional activity, including requirements relating to enrolment on professional or trade registers:
         List and brief description of conditions:

         Directlink to documents with Selection criteria: (URL) https://vergabe.fraunhofer.de/NetServer/SelectionCriteria/54321-Tender-188fbc22605-20fb82c4ce586348

      2. Economic and financial standing:
         List and brief description of selection criteria:

         Directlink to documents with Selection criteria: (URL) https://vergabe.fraunhofer.de/NetServer/SelectionCriteria/54321-Tender-188fbc22605-20fb82c4ce586348

      3. Technical and professional ability:
         List and brief description of selection criteria:

         Directlink to documents with Selection criteria: (URL) https://vergabe.fraunhofer.de/NetServer/SelectionCriteria/54321-Tender-188fbc22605-20fb82c4ce586348

      4. Information about reserved contracts:
         
   2. Conditions related to the contract:
      1. Information about a particular profession:
         Contract performance conditions:

         In the event that subcontractors are used, they must be named and their suitability is likewise to be substantiated on the basis of the listed documents under III.1). Furthermore, it must be confirmed that they will be available if the order is placed; their share in the scope of the contractual object must be stated.

      2. Information about staff responsible for the performance of the contract:
         
4. Section IV
5. Description:
   1. Type of procedure:
      Competitive procedure with negotiation
   2. Information about a framework agreement or a dynamic purchasing system:
      
   3. Information about reduction of the number of solutions or tenders during negotiation or dialogue:
      
   4. Information about negotiation:
      
   5. Information about electronic auction:
      
   6. Information about the Government Procurement Agreement (GPA):
      The procurement is covered by the Government Procurement Agreement: yes
6. Administrative information:
   1. Previous publication concerning this procedure:
      
   2. Time limit for receipt of tenders or requests to participate:
      Date: 2023-08-11
      Local time: 09:00
      
   3. Estimated date of dispatch of invitations to tender or to participate to selected candidates:
      
   4. Languages in which tenders or requests to participate may be submitted:
      DE
   5. Minimum time frame during which the tenderer must maintain the tender:
      Tender must be valid until: 2023-11-30
      (from the date stated for receipt of tender)
      
   6. Conditions for opening of tenders:
      

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