Laboratory, optical and precision equipments (excl. glasses) (Швеция - Тендер #46789022) | ||
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Страна: Швеция (другие тендеры и закупки Швеция) Организатор тендера: Lunds universitet Номер конкурса: 46789022 Дата публикации: 06-10-2023 Источник тендера: Единая система закупок Европейского союза TED |
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Plasma Enhanced Chemical Vapour Deposition (PECVD) 2
Reference number: V 2023/1907The procurement includes delivery, installation and commissioning of one Plasma Enhanced Chemical Vapour Deposition System. The system will be used by a large number of operators in a university laboratory environment. It must be easy to use and be insensitive to frequent change of process between batches. The system is intended for deposition of thin layers of silicon dioxide (SiO2) and as close to “stoichiometric” silicon nitride (Si3N4) as possible.
The procurement includes delivery, installation and commissioning of one Plasma Enhanced Chemical Vapour Deposition System. The system will be used by a large number of operators in a university laboratory environment. It must be easy to use and be insensitive to frequent change of process between batches. The system is intended for deposition of thin layers of silicon dioxide (SiO2) and as close to “stoichiometric” silicon nitride (Si3N4) as possible.
Mercell notice: https://opic.com/id/afcvxjetyc